- LEPD
- Optical monitors
- Quartz controllers
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Intellemetrics products save you
time and resources in setting up thin film deposition and dry etch processes, and
then give you the power to control those thin film deposition and dry etch processes. They
drive down thin film and semiconductor manufacturing costs and increase product
performance. Research users benefit from better control and awareness of their thin film deposition or semiconductor and MEMS dry etch processes.
If you have a Thin Film Coating application then
check out our Optical Monitor
range. Get accurate and precise control of your optical thin film deposition. White light and Laser
thin film optical monitors available, giving accurate termination of your optical thin film layers for quarter wave and non-quarter wave optical layers.
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If you have a Dry Etching application then check out
our Laser End Point Detector range. They give precise endpoint termination for a range of dry etch processes.
Models available for :-
- Si and compound semiconductor etches
- deep MEMS, optical or semiconductors etches using Bosch processes.
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Our
Optical Monitor range is supported by a range of Quartz Crystal
thin film Monitor products. Intellemetrics supply both thin film monitors and controllers, working with multiple quartz crystal heads, in a range of thin film deposition environments from HV to UHV. |
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